Being the standard component for inspection master which is used for the precision inspection of the standard

摘要

PROBLEM TO BE SOLVED: To provide a reference member for an inspection master capable of easily executing precision inspection and calibration of a measuring error in an optical three-dimensional measuring machine, by a method similar to a contact type three-dimensional measuring machine.;SOLUTION: In this each reference member 10 used attached to the inspection master 7 used for the precision inspection in the optical three-dimensional measuring machine, the reference member 10 has a spherical measured face for reflecting measuring light irradiated from the three-dimensional measuring machine, and a plurality of linear grooves M for reflecting irregularly the measuring light is formed on the measured face to be crossed each other in a top of the measured face.;COPYRIGHT: (C)2007,JPO&INPIT