首页>
外国专利>
Semiconductor wafer processing apparatus and method for processing batch of wafers having variable number of wafer lots
Semiconductor wafer processing apparatus and method for processing batch of wafers having variable number of wafer lots
展开▼
机译:半导体晶片处理设备和用于处理一批晶片数量可变的晶片的方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
Disclosed is a semiconductor processing apparatus for processing batches of wafers with variable numbers of wafer lots. The apparatus includes an operator interface server adapted to receive batch information for a track-in operation, an equipment management server adapted to store data used to process the batch of wafers, and a device interface server adapted to control a selected unit of processing equipment used to process the batch of wafers. The batch information is transmitted from the operator interface server to the device interface server, and the device interface server attempts to set a sub-recipe in the selected unit of processing equipment based on the batch information. After the sub-recipe is set in the selected unit of processing equipment, the device interface server then attempts to set a process recipe in the device interface server.
展开▼