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A PROCESS FOR THE FABRICATION OF IMPROVED CONDUCTOR FOR POWER THICK FILM HYBRID MICROCIRCUITS /MICROWAVE INTEGRATED CIRCUITS(PHMC)
A PROCESS FOR THE FABRICATION OF IMPROVED CONDUCTOR FOR POWER THICK FILM HYBRID MICROCIRCUITS /MICROWAVE INTEGRATED CIRCUITS(PHMC)
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机译:功率厚膜混合微电路/微波集成电路(PHMC)改进导体的制造工艺
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摘要
A process for the fabrication of improved conductor for power thick film hybrid microcircuits/microwave integrated circuits by preparing known thick film conductors selected from Pd-Ag, Pt-Ag, Pd-Pt-Ag on thick film circuits by conventional methods; surface cleaning the thick film conductor paths obtained by known methods; shorting the conductor paths by known means; electroplating the conductors with copper in a standard conventional electroplating bath to grow a desired plating thickness of 4µm; removing shorting done from conductor paths; cleaning the resultant copper plated conductor paths on thick film substrate in distilled water.
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