Manufacturing Facility and Method for Multilayer EAP Film

摘要

A method for fabricating a multilayered polymer thin film is provided to solve problems caused by a manual operation by using a built-in apparatus for automatization. Liquid silicon is coated according to the capacity of the thickness of a thin film. The liquid silicon is prepared by using a syringe receptacle of a cartridge type in which an organic solvent is added to a dielectric material to be mixed with the dielectric material so that solidification caused by a contact with the air is avoided and proper viscosity is maintained. The liquid silicon thin film is cured at a predetermined temperature. A flexible electrode is stacked on the cured dielectric thin film. The abovementioned processes are repeated so that a dielectric thin film and an electrode are sequentially stacked to form a multilayered polymer actuator.