Method for laser endoscopy e.g. for medical work and for semiconductor processing, requires laser pulse for producing multi-photon processes as target ionization

摘要

A micro-processing method involves a laser pulse having a pulse energy of 0.05 nJ to 100 muj of a femto-second laser in an endoscopic optical system, comprising a transmission system with small diameter and in which object-side miniature optics with large numerical aperture exceeding 0.55 is coupled and is focussed on to an illumination spot of less that 10 micro-meters. This laser pulse produces multi-photon processes in the form of a target ionization, optical revelation, and plasma forming with transient intensities exceeding 100GW/cm 2.