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METHOD OF FABRICATING TRANSPARENT CONDUCTING FILM OF ALUMINUM DOPED ZINC OXIDE BY USING AEROSOL
METHOD OF FABRICATING TRANSPARENT CONDUCTING FILM OF ALUMINUM DOPED ZINC OXIDE BY USING AEROSOL
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机译:气溶胶法制备掺铝氧化锌透明导电膜的方法
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摘要
PROBLEM TO BE SOLVED: To provide a method of fabricating high conductive and high transparent conducting films easily and efficiently at low cost without impairing the conductivity of aluminum doped zinc oxide particulates as a raw material.;SOLUTION: The method includes a step (I) of forming aerosol by mixing a carrier gas to aluminum doped zinc oxide particulates, and a step (II) of spraying the aerosol from a nozzle for collision to a substrate and form a transparent conducting film of the particulates.;COPYRIGHT: (C)2009,JPO&INPIT
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