FILM FOR INFRARED DETECTION, INFRARED DETECTION DEVICE, AND MANUFACTURING METHOD OF FILM FOR INFRARED DETECTION

摘要

PROBLEM TO BE SOLVED: To provide an organic thin film for a dielectric bolometer manufacturable in a low-temperature process, for showing TCD having a sufficient size for putting the dielectric bolometer to practical use; an infrared detection device using it; and a manufacturing method of the organic thin film for the dielectric bolometer.;SOLUTION: A film for infrared detection formed from a vinylidene fluoride-based polymer, which is a film for infrared detection whose relative dielectric constant is changed according to a temperature, and the infrared detection device using the film are provided. A process for forming the film for infrared detection preferably includes a process for producing a solution by dissolving the vinylidene fluoride-based polymer into an organic solvent, and applying and depositing it on a substrate; and a post treatment process for vaporizing the organic solvent by heating the substrate onto which the solution is applied, and annealing a dielectric body film.;COPYRIGHT: (C)2009,JPO&INPIT