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METHOD FOR CONFORMING PHASE OF SURFACE PLASMON WAVE AND METHOD FOR TRIMMING SURFACE PLASMON WAVE-GUIDE
METHOD FOR CONFORMING PHASE OF SURFACE PLASMON WAVE AND METHOD FOR TRIMMING SURFACE PLASMON WAVE-GUIDE
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机译:表面等离子波的相变方法和表面等离子波的修剪方法
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摘要
A method for conforming phase of a surface plasmon wave and a method for trimming a surface plasmon wave-guide are provided to match the phase of the surface plasmon by cutting out the surface plasmon waveguide by a phase of surface plasmon wave. In a method for conforming phase of a surface plasmon wave and a method for trimming a surface plasmon wave-guide, a surface plasmon wave is measured, and the phase measurement value corresponding to the phase of the surface plasmon wave is generated(S300). The tolerance range corresponding to the target value which is predetermined in advanced and the phase measurement value are compared(S400). If the phase measurement value is not included in the tolerance range, the shape of the surface plasmon waveguide is transformed(S500).
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