röntgendiffrak position measuring apparatus with an optical debye - the scherrer method - system and röntgendiffrak tion mes a method for this apparatus

摘要

röntgendiffrak a position measuring apparatus with an optical debye - the scherrer method - a system has a means (10) for generating a characteristic x-ray radiation, with which a sample to be examined (s) is irradiated, an x-ray detector (30) around the sample (s) is arranged around, and focusing means (100) which, between the sample (s) and the x-ray detector (30) are arranged, in order from the sample (s) to collect the scattered x-radiation, having a predetermined angular range in the circumferential direction around the sample (s) covers around, and for irradiating the x-ray radiation sensor (30) with this radiation.