röntgendiffrak position measuring apparatus with an optical debye - the scherrer method - system and röntgendiffrak tion mes a method for this apparatus

摘要

Position measuring apparatus with röntgendiffrak:a means (10) to produce a characteristic x-ray radiation, with which a sample to be measured (s) is irradiated, andan x-ray detector (30),characterized in thatthe position measuring apparatus röntgendiffrak a debye - the scherrer method - a system, and the x-ray radiation, onto the sample (s) is blasted, to a parallel ray of a predetermined diameter is bundled,the x-ray detector (30) surrounds the sample (s),a focusing means (100) is present between the sample (s) and the x-ray detector (30) is arranged to x-ray scattering radiation from the sample (s) to collect, and which provides a predetermined angle in the circumferential direction around the sample (s), wherein the focusing means (100) the x-ray radiation to the x-ray detector (30) radiates,the focusing means (100) is provided with a plurality of pivotable mirrors, which consist of artificial multilayer systems are made with a parabolic surface.