INSULATIVE TARGET MATERIAL, METHOD FOR MANUFACTURING INSULATIVE TARGET MATERIAL, ELECTROCONDUCTIVE COMPLEX-OXIDE FILM, AND DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an insulative target material used for producing an electroconductive complex-oxide film which is uniform, has high insulation properties and has adequate characteristics.;SOLUTION: The insulative target material is used for producing the electroconductive complex-oxide film having a composition expressed by general formula ABO₃, and includes the oxide of an element (A), the oxide of an element (B), and at least one of an Si compound and a Ge compound.;COPYRIGHT: (C)2010,JPO&INPIT