MANUFACTURING METHOD OF BACK CONTACT SINGLE HETEROJUNCTION-TYPE SOLAR BATTERY, AND BACK CONTACT SINGLE HETEROJUNCTION-TYPE SOLAR BATTERY

摘要

PPROBLEM TO BE SOLVED: To provide a back contact single heterojunction-type solar battery and a manufacturing process thereof. PSOLUTION: In the manufacturing method of this solar battery, at first, there is provided a first semiconductor substrate doped with a first dopant-type in a low concentration. The substrate has a first energy band gap. Next, in a region of the backside of the substrate, a second semiconductor film is formed. The second semiconductor film has a second energy band gap larger than the first energy band gap. On the surface of the substrate, there is formed a third semiconductor layer doped with the first dopant in a medium concentration and subjected to a small convex and concave processing. On the backside of the substrate, there are formed an emitter doped with a second dopant-type having a polarity reverse to that of the first dopant type in a high concentration and a base doped with the first dopant-type in a high concentration. The base and the emitter are electrically connected with each other. Any one of the base and the emitter is formed on the base and the emitter. PCOPYRIGHT: (C)2010,JPO&INPIT