STATISTICAL SPICE MODEL PARAMETER CALCULATION METHOD, STATISTICAL SPICE MODEL PARAMETER CALCULATION DEVICE AND PROGRAM

摘要

PPROBLEM TO BE SOLVED: To provide a statistical SPICE (Simulation Program with Integrated Circuit Emphasis) model parameter calculation method for creating a high-accuracy and size-dependent variation model. PSOLUTION: Actual measurements of element characteristic values of a multipoint-measured semiconductor device are performed by principal component analysis in each device size (a principal component analysis process). Based on a result of the principal component analysis obtained in each device size and predetermined device size dependence, a statistical SPICE model parameter reproducing a variation in the element characteristic value in the plurality of device sizes is calculated (a parameter calculation process). PCOPYRIGHT: (C)2010,JPO&INPIT