STATISTICAL SPICE MODEL PARAMETER CALCULATION METHOD, AND STATISTICAL SPICE MODEL PARAMETER CALCULATION DEVICE AND PROGRAM

摘要

A statistical SPICE model parameter calculation method in which it is possible to create a variation model having high accuracy and size dependency. A principal component analysis is performed, for respective device sizes, of a measurement of an element characteristic value of a semiconductor device on which multipoint measurement is performed (principal component analysis process). A statistical SPICE model parameter that reproduces variation of an element characteristic value for a plurality of device sizes is calculated based on a result of the principal component analysis obtained for each of the device sizes and predetermined device size dependency (parameter calculation process).