Method for extracting white area of SEM image and method for calculating feature amount in SEM image

摘要

PPROBLEM TO BE SOLVED: To provide an extraction processing method of a white band region used for forming an outline by using an objective SEM image as a raw image and capable of preventing the extracted white band image from being easily separated even when contrast is low. PSOLUTION: Least squares approximation is applied to each pixel Pij of the raw image by using a template function of the following equation (1) obtained by expressing a pixel value z of a region in the vicinity of the pixel as a function of a position (x, y); whether or not the pixel Pij is located on a ridge of the obtained approximation function is determined; and the image is binarized by allocating a value of 1 or a value of 0 to the pixel Pij according to the determination result. The equation (1) is represented by z=f(x, y). PCOPYRIGHT: (C)2006,JPO&NCIPI