SEM SEM SEM IMAGE ACQUISITION DEVICE AND SEM IMAGE ACQUISITION METHOD

摘要

(Object) The present invention relates to an SEM image acquisition apparatus and an SEM image acquisition method, in which, when an image in a different scan direction is acquired, an electron beam is scanned in correspondence with a pixel to acquire and synthesize an image, To obtain an image of the pixel signal from the image signal and to realize synthesis. Scanning signal generating means for generating a scanning signal for rotating the scanning direction of the electron beam scanning the sample image and irradiating the same area of the sample on the position of the sample image corresponding to the same pixel; Amplifying means for detecting and amplifying a signal from a position on the sample irradiated with the electron beam and a detecting means for detecting a sample image corresponding to the same pixel on the same sample region based on the detected and amplified signal, And image generating means for generating an image when the position is checked.