首页>
外国专利>
Method for improving yield of a layout and recording medium having the layout
Method for improving yield of a layout and recording medium having the layout
展开▼
机译:用于提高布局的成品率的方法以及具有该布局的记录介质
展开▼
页面导航
摘要
著录项
相似文献
摘要
A yield of a semiconductor layout may be improved by selecting a pattern that does not satisfy at least one of multiple rules within the layout, adding a margin to a predetermined value of the at least one of the rules associated with selected pattern, based on a ground rule and a recommended rule of each of the rules, calculating an overall fail rate of at least one of the rules that varies according to the addition of the margin, and determining an adjusted margin to be added based on the calculated overall fail rate.
展开▼