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Versatile Semiconductor Manufacturing Controllers with Statistically Repeatable Response Times
Versatile Semiconductor Manufacturing Controllers with Statistically Repeatable Response Times
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机译:具有统计可重复响应时间的多功能半导体制造控制器
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摘要
The present invention relates to process I/O controllers for semiconductor manufacturing to which a tool host can delegate data collection, monitoring and control tasks. In particular, it relates to process I/O controllers that can perform more than one of data collection, monitoring, control and response to commands from a tool host with statistically repeatable performance and precision. Embodiments described use prioritized real time operating systems to control of semiconductor manufacturing tools and data collection from tool associated with the sensors. Statistically repeatable responsiveness to selected commands and to sensor inputs during selected recipe steps effectively reduces jitter.
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