MANUFACTURING NANO-PILLARS MAGNETISM-MEMBRANE WITH PERPENDICULAR ANISOTROPY

摘要

PURPOSE: A method for manufacturing magnetic thin film of nanopillars with perpendicular anisotropy is provided to obtain Co pattern when non-magnetic materials as well as other magnetic materials of Fe, Ni or their alloy are electrodeposited. CONSTITUTION: A method for manufacturing magnetic thin film of nanopillars with perpendicular anisotropy comprises a fist process including two-steps anode oxidation and a second process. The first process comprises the steps of: processing thermally; etching with alkali; a first anode oxidation; eliminating the pore of an oxide film; a second anode oxidation; expanding the pore of the oxide film; eliminating the opposite aluminum in copper chloride(CuCl2) solution of 0.1mole after deposition of gold on the face in which the oxide film of pure aluminium thin plate is formed; expanding the pore in 3~5 % phosphoric acid. The second process is the step of manufacturing Co nano pattern by electrodepositing pure aluminium thin plate passed through the two-step anodic oxidation process in the cobalt sulfate(CoSO4) solution of 0.1mole using standard electrode, working electrode, counter electrode and bridge.