FILM FORMING DEVICE, A METHOD FOR CLEANING THE SAME, AND A COMPUTER READABLE STORAGE MEDIUM, CAPABLE OF SUPPLYING CLEANING GAS TO THE UPPER SIDE OF A SUSCEPTOR BY INSTALLING A CLEANING NOZZLE ADJACENT TO THE UPPER SIDE OF THE SUSCEPTOR

摘要

PURPOSE: A film forming device, a method for cleaning the same, and a computer readable storage medium are provided to remove a deposit on a susceptor without excessively exposing the inner side of the chamber to the cleaning gas.;CONSTITUTION: A susceptor(2) is pivotally installed inside a container(1). The substrate loading area is installed on one side of the susceptor and the substrate is loaded on the substrate loading area. A raw gas supply system supplies the raw gas on one side of the susceptor. A first concave unit partitions a reverse concave space by opening to one side of the susceptor upwardly. A second concave unit covers the first concave unit to partition a gas flow path between the first and second concave units. A cleaning gas supply unit supplies the cleaning gas to the reverse concave space. A cleaning structure(60) is connected to the gas flow path and includes an exhaust pipe(61) extended to the outside of the container. The exhaust pipe is formed on the container to exhaust the raw gas.;COPYRIGHT KIPO 2010