首页> 外国专利> Fabrication method of transparent gate electrode for field effect transistor using carbon nanotube and Field effect transistor fabricated by the same

Fabrication method of transparent gate electrode for field effect transistor using carbon nanotube and Field effect transistor fabricated by the same

机译:使用碳纳米管的场效应晶体管的透明栅电极的制造方法和由其制造的场效应晶体管

摘要

A method of fabricating transparent gate electrode for field effect transistor using carbon nanotube and a field effect transistor fabricated by the same are provided to form a uniform carbon nanotube thin film by using a chemical treatment using a acid solution. Provided is the carbon nanotube aqueous solution which is functional as the carboxyl group(-COOH) through the chemical treatment. The carbon nanotube is dipped into the mixture of a nitric acid and sulfuric acid for predetermined time by using a sonicator. The volume ratio of the nitric acid and sulfuric acid is 4:1. The polymer substrate(20) is processed and the surface of the membranous polymers substrate is functional as the amine radical. To form the carbon nanotube thin film for a gate electrode on the membranous polymers substrate, the polymer substrate which is functional as the amine radical is put into the carbon nanotube aqueous solution for a predetermined time. The membranous polymers substrate is PES(Polyethylenesulfonate).
机译:提供一种使用碳纳米管制造用于场效应晶体管的透明栅电极的方法以及由其制造的场效应晶体管,以通过使用酸溶液进行化学处理来形成均匀的碳纳米管薄膜。提供通过化学处理起羧基(-COOH)的作用的碳纳米管水溶液。通过使用超声仪将碳纳米管浸入硝酸和硫酸的混合物中预定的时间。硝酸与硫酸的体积比为4:1。加工聚合物基材(20),并且膜状聚合物基材的表面起胺基的作用。为了在膜状聚合物基板上形成用于栅电极的碳纳米管薄膜,将起胺基作用的聚合物基板在碳纳米管水溶液中放置预定时间。膜聚合物底物是PES(聚乙烯磺酸盐)。

著录项

  • 公开/公告号KR100954325B1

    专利类型

  • 公开/公告日2010-04-21

    原文格式PDF

  • 申请/专利权人

    申请/专利号KR20080008972

  • 发明设计人 신건철;하정숙;

    申请日2008-01-29

  • 分类号H01L29/772;

  • 国家 KR

  • 入库时间 2022-08-21 18:31:18

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