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Fabrication method of transparent gate electrode for field effect transistor using carbon nanotube and Field effect transistor fabricated by the same
Fabrication method of transparent gate electrode for field effect transistor using carbon nanotube and Field effect transistor fabricated by the same
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机译:使用碳纳米管的场效应晶体管的透明栅电极的制造方法和由其制造的场效应晶体管
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摘要
A method of fabricating transparent gate electrode for field effect transistor using carbon nanotube and a field effect transistor fabricated by the same are provided to form a uniform carbon nanotube thin film by using a chemical treatment using a acid solution. Provided is the carbon nanotube aqueous solution which is functional as the carboxyl group(-COOH) through the chemical treatment. The carbon nanotube is dipped into the mixture of a nitric acid and sulfuric acid for predetermined time by using a sonicator. The volume ratio of the nitric acid and sulfuric acid is 4:1. The polymer substrate(20) is processed and the surface of the membranous polymers substrate is functional as the amine radical. To form the carbon nanotube thin film for a gate electrode on the membranous polymers substrate, the polymer substrate which is functional as the amine radical is put into the carbon nanotube aqueous solution for a predetermined time. The membranous polymers substrate is PES(Polyethylenesulfonate).
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