Electrical energy guiding device for use in vacuum-technical applications, has hollow body enclosing hole, and electrical feed-through arranged at side of body, where body is made from material optimized for vacuum-technical applications

摘要

The device has a flange (40) connected to a vacuum device (10), and a connector housing (120) for vacuum-sealed accommodation of plug contacts (140). The flange has a through-hole for an electrical conductor (130) and stays in connection with a hollow body (50). Sensors and measuring cells are connected to the conductor, and the body encloses the hole. An electrical feed-through (60) with contact pins (90) is arranged at a side of the body, and has a stainless steel plate. The conductor runs in an inner side of the body that is made from material optimized for vacuum-technical applications.