The revelation of dislocations emergentes in the lens has a base of germanium

摘要

The present invention relates to a method of detecting faults, more particularly, of dislocations to be faced with an element having at least a surface layer on the basis of germanium lens. The method comprises an annealing step of the element under an atmosphere containing a mixture of at least one oxidizing gas and a neutral gas, allowing the selective oxidation of the dislocations to be faced with the surface layer on the basis of germanium lens.