In order wave front form measuring method and measurement wave front form amendment manner null of the large-sized suffering observation body due to

摘要

PROBLEM TO BE SOLVED: To find a large-sized measured wave front shape without producing errors in connecting processing of each small aperture area by relatively scan ning a large-sized body to be observed by an interferometer or the like, detecting translation errors and inclination errors produced by accompanying the scanning in each measured small aperture area and performing aperture synthesis processing after correction from calculation.;SOLUTION: The aperture of the interferometer is scanned on the object to be observed 2 and an interference stripe image is acquired whenever it is scanned up to a prescribed distance (S100). Next, Fourier transformation is performed on two stripe image data before and after scanning, the carrier frequency and complex amplitude of the stripe image are extracted, and the inclination errors and the translation errors of each aperture shape are detected by a scanning guide (S101). Finally, the errors of the scanning is corrected by the aperture synthesis method, and each corrected interference stripe image is connected (S102).;COPYRIGHT: (C)2002,JPO