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Scanning Impedance Microscopy (SIM) To Map Local Impedance In A Dielectric Film
Scanning Impedance Microscopy (SIM) To Map Local Impedance In A Dielectric Film
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机译:扫描阻抗显微镜(SIM)映射介电膜中的局部阻抗
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摘要
A scanning impedance microscopy device maps out local impedance in a dielectric film sample. This may be used to detect conductive filaments in a dielectric film, to characterize semiconductor interfaces, and to be used a reading scheme for resistive change memory such as RRAM.
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