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Batch fabricated rectangular rod, planar MEMS quadrupole with ion optics
Batch fabricated rectangular rod, planar MEMS quadrupole with ion optics
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机译:批量制造的矩形棒,带离子光学元件的平面MEMS四极杆
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摘要
A quadrupole mass filter (QMF) is provided. The QMF includes a plurality of rectangular shaped electrodes aligned in a symmetric manner to generate a quadrupole field. An aperture region is positioned in a center region parallel to and adjacent to each of the rectangular shaped electrodes. An incoming ion stream enters the aperture region so as to be controlled by the quadrupole field.
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