APPARATUS FOR INSPECTION OF A SUBSTRATE, CAPABLE OF MINIMIZING A SETTING TIME IN A FIELD WORK LINE

摘要

PURPOSE: An apparatus for inspection of a substrate is provided to minimize air loss by arranging a pattern-recessive groove on the bottom of an air exhaust nozzle making up a lifting module.;CONSTITUTION: In an apparatus for inspection of a substrate, a process part(100) having an automatic optics equipment(120) and a lifting module(130) on the top of a first frame(110). A loading part(200) and an un-loading part which have a plurality of lifting modules are arranged on both side of the process part. A transfer unit(150) vacuum-absorbs the substrate putting on the lifting module and transfer it to the processing part and the un-loading part. A height adjusting unit(140), controlling the height of first and second frames, is mounted on the bottom of the first and second frame of the loading part and the un-loading part. Each lifting module are mounted on the top of the first and second frames.;COPYRIGHT KIPO 2011