MANUFACTURING METHOD OF NANOWIRE OR NANOROD FOR FIELD EMISSION DEVICE WHICH CAN INCREASE THE AMOUNT OF ELECTRONICS EMITTED PER UNIT AREA, AND FIELD EMISSION DEVICE USING THE ABOVE

摘要

PURPOSE: A manufacturing method of nanorod is provided to sufficiently maintain intervals between nanotips and to maximize a number of tips by forming nanotips from multilayerd of nanospheres with 'a different size. ;CONSTITUTION: The manufacturing method of nanowire or nanorod for field emission device includes following steps.(a) A single layer of nanospheres are arranged on a conductive substrate. A first layer is formed.(b) A single layer of nanospheres, 'of which diameters are 2-20 times larger than those of the first layer', in the upper body of the first layer. A second layer is formed.(c) By use of a metal evaporation method, a metal catalyst layer is formed on the substrate through empty space among the nanospheres of the first layer.(d) The nanospheres are eliminated. A nanotips group 'composed of nanowire or nanorod' is formed on the metal catalyst layer.;COPYRIGHT KIPO 2011