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Manufacturing method of field emission electron gun, field emission electron gun by the manufacturing method, charged particle beam device, method of reproducing field emission electron gun, field emission electron gun by the reproducing method, charged particle beam device, and plural Split emitter electrode
Manufacturing method of field emission electron gun, field emission electron gun by the manufacturing method, charged particle beam device, method of reproducing field emission electron gun, field emission electron gun by the reproducing method, charged particle beam device, and plural Split emitter electrode
PPROBLEM TO BE SOLVED: To provide a manufacturing method of a field emission electron gun capable of forming extremely-thin needle-like parts at a tip of an emitter electrode by etching a tip surface of the emitter electrode. PSOLUTION: In this manufacturing method of a field emission electron gun provided with multiply divided emitter electrodes for emitting electron beams, by removing and processing a tip part 28 of the emitter electrode 21 by irradiating the tip part 28 with a focused ion beam I, a plurality of needle-like parts 30 independent of one another and extending in the emitting direction of the electron beams are formed at the tip part 28. PCOPYRIGHT: (C)2008,JPO&INPIT
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