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QUANTIFICATION AND IN-DEPTH COMPOSITIONAL PROFILING METHODS FOR THE MAIN COMPONENTS OF MULTI-COMPONENT ALLOY FILMS BY SECONDARY ION MASS SPECTROMETRY USING TOTAL NUMBER COUNTING METHOD
QUANTIFICATION AND IN-DEPTH COMPOSITIONAL PROFILING METHODS FOR THE MAIN COMPONENTS OF MULTI-COMPONENT ALLOY FILMS BY SECONDARY ION MASS SPECTROMETRY USING TOTAL NUMBER COUNTING METHOD
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机译：总离子计数法二次离子质谱法对多成分合金薄膜主要成分的定量和深度组成分析方法
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摘要
The present invention discloses a method for analyzing a quantitative analysis and composition distribution according to depth by a secondary ionization mass spectrometry using a total sum method for a multi-component alloy thin film such as a thin film for a compound thin film solar cell. It is possible to provide a standard for maximizing performance by enabling history management.
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