首页> 外国专利> Producing pure silicon, comprises subjecting molten silicon to a purification step in a directional solidification, heating molten silicon by bath surface, removing molten silicon from a warmed heatsink, and controlling solidification rate

Producing pure silicon, comprises subjecting molten silicon to a purification step in a directional solidification, heating molten silicon by bath surface, removing molten silicon from a warmed heatsink, and controlling solidification rate

机译:生产纯硅,包括在定向凝固中对熔融硅进行纯化步骤,通过熔池表面加热熔融硅,从加热的散热器中除去熔融硅以及控制固化速率。

摘要

Producing pure silicon, comprises: subjecting molten silicon to at least one purification step in a directional solidification, where the directional solidification takes place in a crucible; heating the molten silicon by bath surface using plasma torch; removing the molten silicon from a warmed heatsink associated with the bottom of the crucible; and controlling the solidification rate, in which the solidification is moved from the crucible bottom to the melt bath surface, by temporal change of the cooling capacity of the heatsink. An independent claim is included for a device for performing the above process, comprising a furnace (1), in which a crucible (5) is placed on a heatsink (4), where the crucible is surrounded by a thermal insulation (6) on all sides, at least one plasma torch (9) for heating silicon introduced in the crucible from the top of the crucible and a control device (13) that is controlled over the both cooling capacity of the heatsink and the heat output of the plasma torch for adjusting the speed with which the solidification front in the molten silicon moves from the bottom crucible to the down melt surface.
机译:生产纯硅,包括:使熔融硅在定向凝固中经受至少一个纯化步骤,其中定向凝固在坩埚中进行;用等离子炬在熔池表面加热熔融硅。从与坩埚底部相关的热散热器中除去熔融硅;通过使散热器的冷却能力随时间变化,来控制固化速度,在该固化速度中,固化从坩埚底部向熔池表面移动。包括用于执行上述过程的设备的独立权利要求,该设备包括炉子(1),其中将坩埚(5)放置在散热器(4)上,其中坩埚被散热装置(6)包围。在所有侧面上,至少一个等离子炬(9)用于加热从坩埚顶部引入到坩埚中的硅,以及控制装置(13),该装置可控制散热器的冷却能力和等离子炬的热量输出用于调节熔融硅中的凝固前沿从底部坩埚移至下熔体表面的速度。

著录项

  • 公开/公告号DE102009041444A1

    专利类型

  • 公开/公告日2011-03-24

    原文格式PDF

  • 申请/专利权人 ETEC GMBH;

    申请/专利号DE20091041444

  • 发明设计人 HUGO FRANZ;

    申请日2009-09-16

  • 分类号C01B33/037;C30B11/02;

  • 国家 DE

  • 入库时间 2022-08-21 17:47:44

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