METHOD FOR FORMING ELECTRICALLY CONDUCTIVE TRANSPARENT ZINC OXIDE-BASED FILM, ELECTRICALLY CONDUCTIVE TRANSPARENT ZINC OXIDE-BASED FILM AND ELECTRICALLY CONDUCTIVE TRANSPARENT SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide a method for forming an electrically conductive transparent zinc oxide-based film which combines excellent electroconductivity with excellent chemical durability.;SOLUTION: The method for forming an electrically conductive transparent zinc oxide-based film employs a sputtering method to form an electrically conductive transparent zinc oxide-based film. The method uses a target obtained by processing an oxide sintered compact or an oxide mixture substantially comprising zinc, titanium and oxygen, wherein the atomic ratio Ti/(Zn+Ti) of the titanium to the sum of the zinc and the titanium is greater than 0.02 but does not exceed 0.1. In the electrically conductive transparent film formed by the method of formation, the atomic ratio Ti/(Zn+Ti) of the titanium to the sum of the zinc and the titanium included in the electrically conductive transparent film is greater than 0.02 but does not exceed 0.1.;COPYRIGHT: (C)2012,JPO&INPIT