COMPOSITION FOR PRODUCING ZINC OXIDE THIN FILM AND METHOD FOR PRODUCING ZINC OXIDE THIN FILM USING COMPOSITION FOR PRODUCING DOPED ZINC OXIDE THIN FILM, ANTISTATIC THIN FILM PRODUCED BY THE METHOD, ULTRAVIOLET RAY CUT THIN FILM, AND TRANSPARENT ELECTRODE THIN FILM

摘要

PROBLEM TO BE SOLVED: To provide a method for obtaining a transparent zinc oxide thin film and a zinc oxide thin film doped with a group 3B element by coating film-formation such as spin coating, using a composition for producing the zinc oxide thin film that is made of organic zinc compound as raw material, has no ignitability, and is easily treated.;SOLUTION: This method for producing the zinc oxide thin film having an average transmittance of 80% or higher for visible light includes at least one operation of applying one of compositions A-C to a substrate surface under an inert gas atmosphere and then heating the obtained coated object. The composition A contains partial hydrolyzate of an organic zinc compound, and the molar ratio of added water to the organic zinc compound is 0.05 or higher and lower than 0.4. The composition B contains a product obtained by adding water to a solution of the organic zinc compound and a group 3B element compound and partially hydrolyzing the organic zinc compound. The molar ratio of the group 3B element compound to the organic zinc compound is 0.005-0.3. The molar ratio of the addition amount of water to the total amount of the organic zinc compound and the group 3B element compound is 0.05 or higher and lower than 0.4. The composition C contains a product obtained by adding the group 3B element compound to the partial hydrolyzate of the organic zinc compound so that the molar ratio thereof to the organic zinc compound is 0.005-0.3. The molar ratio of the added water to the organic zinc compound is 0.05 or higher and lower than 0.4.;COPYRIGHT: (C)2012,JPO&INPIT