PIEZOELECTRIC THIN FILM AND ITS MANUFACTURING METHOD, INKJET HEAD, METHOD FOR FORMING IMAGE USING INKJET HEAD, ANGULAR VELOCITY SENSOR, METHOD FOR MEASURING ANGULAR VELOCITY USING ANGULAR VELOCITY SENSOR, PIEZOELECTRIC POWER GENERATION ELEMENT, AND METHOD FOR GENERATING POWER USING PIEZOELECTRIC POWER GENERATION ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a (Na,Bi)TiO₃-BaTiO₃ thin film with an excellent crystal orientation, and its manufacturing method to realize a lead-free thin film with a good piezoelectric characteristic.;SOLUTION: In a perovskite type composite oxide (Na,Bi)TiO₃-BaTiO₃ piezoelectric layer 15 formed on an electrode film 13 in an orientation (111) on a substrate 12, (Na_xBi_0.5)TiO_0.5x+2.75-BaTiO₃(0.29x0.4) interface film 14 in the orientation (111) is provided adjacent to an interface to the electrode film 13. The (Na,Bi)TiO₃-BaTiO₃ piezoelectric layer 15 according to the present invention shows an excellent piezoelectric characteristic by orienting a strong crystal only in the orientation (111), so that the piezoelectric thin film of a lead-free element can be provided. The present invention can be applied to an inkjet head, an angular velocity sensor, a piezoelectric power generation element and the like.;COPYRIGHT: (C)2012,JPO&INPIT