PIEZOELECTRIC THIN FILM, METHOD FOR MANUFACTURING SAME, INKJET HEAD, METHOD FOR FORMING IMAGE USING INKJET HEAD, ANGULAR VELOCITY SENSOR, METHOD FOR MEASURING ANGULAR VELOCITY USING ANGULAR VELOCITY SENSOR, PIEZOELECTRIC POWER GENERATION ELEMENT, AND METHOD FOR GENERATING POWER USING PIEZOELECTRIC POWER GENERATION ELEMENT

摘要

The objective of the present invention is to provide a lead-free piezoelectric thin film containing a lead-free ferroelectric material and having a low dielectric loss and the same high piezoelectric performance as PZT, and to provide a method for manufacturing the lead-free piezoelectric thin film. This piezoelectric thin film has a layered structure. The layered structure has an electrode film and a (1 - x)(Na, Bi)TiO₃ - xBaTiO₃film having an orthorhombic crystal structure (where x represents a value from 0.03 to 0.15, inclusive).