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METHODS OF ENHANCING PERFORMANCE OF FIELD-EFFECT TRANSISTORS AND FIELD-EFFECT TRANSISTORS MADE THEREBY

机译:增强场效应晶体管性能的方法及其由此产生的场效应晶体管

摘要

Methods of enhancing the performance of a field-effect transistor (FET) by providing a percolating network of metallic islands to the inversion layer of the FET so as to effectively reduce the channel length of the FET. The metal islands can be provided in a number of ways, including Volmer- Weber metallic film growth, breaking apart continuous metallic film, patterning metallic coating, dispersing metallic particles in a semiconducting material, applying a layer of composite particles having metallic cores and semiconducting shells and co-sputtering metallic and semiconducting materials, among others. FETs made using disclosed methods have a novel channel structures that include metallic islands spaced apart by semiconducting material.
机译:通过向FET的反型层提供金属岛的渗滤网络来增强场效应晶体管(FET)性能的方法,以有效地减小FET的沟道长度。可以通过多种方式提供金属岛,包括Volmer-Weber金属膜的生长,分离连续的金属膜,对金属涂层进行构图,将金属颗粒分散在半导体材料中,施加具有金属芯和半导体壳的复合颗粒层以及共同溅射金属和半导体材料等。使用公开的方法制成的FET具有新颖的沟道结构,该沟道结构包括被半导体材料隔开的金属岛。

著录项

  • 公开/公告号EP2389683A4

    专利类型

  • 公开/公告日2012-06-27

    原文格式PDF

  • 申请/专利权人 VERSATILIS LLC;

    申请/专利号EP20090839030

  • 发明设计人 JAIN AJAYKUMAR R.;

    申请日2009-12-21

  • 分类号H01L21/336;H01L29/786;

  • 国家 EP

  • 入库时间 2022-08-21 17:14:41

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