Method for coating surface utilizing silicon-doped propane air flame, involves directing partial beams onto detector, which detects interferogram, to which discrete Fourier transform is applied to determine absorption spectrum

摘要

The method involves depositing reaction product of a precursor on a surface. An infrared radiation emitting medium (M) is analyzed by polychromatic infrared radiation (L). A Fourier transform infrared spectrometer (1) is positioned in an infrared source (3). The infrared radiation is splitted into two partial beams in a beam splitter. The superimposed partial beams are directed through the infrared radiation emitting medium onto a detector (9), which detects an interferogram, to which discrete Fourier transform is applied to determine absorption spectrum from output values.