Method for determining depth of irregularities of object within dielectric workpiece, involves generating inversions of image based on point spread and evaluating inversions, so that depth of irregularities of object is determined

摘要

The method involves providing a microwave emitter with a gap in a direction of z coordinate of varying point spread. A region of workpiece containing object is imaged, by irradiation of area with microwave emitters and measurement of reflection. The inversions of image is generated (106) based on the point spread and is evaluated, so that depth of irregularities of object is determined (110). Independent claims are included for the following: (1) computer program product for determining depth of irregularities of object within dielectric workpiece; and (2) device for determining depth of irregularities of object within dielectric workpiece.