METHOD FOR FORMING CERAMIC THICK FILM ELEMENT ARRAYS WITH FINE DIMENSIONS, CERAMIC THICK FILM ELEMENT ARRAYS WITH HIGH-DEFINITION SHAPES, AND CERAMIC THICK FILM ELEMENT ARRAYS WITH HIGH ASPECT RATIOS

摘要

PROBLEM TO BE SOLVED: To provide a method of forming ceramic thick film element arrays (e.g., piezoelectric element arrays of piezoelectric ceramic such as PZT) with characteristics such as fine dimensions, high-definition shapes, and high aspect ratios.;SOLUTION: A ceramic material such as a piezoelectric material is deposited into a mold disposed on a temporary substrate (104). The mold is removed to obtain molded elements, such as piezoelectric elements, made of the ceramic material (106). The elements are sintered (108) and bonded to a target substrate (112). Then, the temporary substrate is removed (114). Optionally, electrodes are deposited on the elements (110, 116). The mold is formed from, e.g., SU-8 or other photoresist materials (102).;COPYRIGHT: (C)2013,JPO&INPIT