The foreign material of the vacuum blower device to start scratching, 2 these revolving shafts which have

摘要

PROBLEM TO BE SOLVED: To provide a control method for raking out foreign substances of a vacuum pump apparatus and a vacuum pump apparatus, which execute raking-out operation of deposits generated inside a pump even if a pump becomes a completely cooled state, and can significantly avoid restart failure from the cooled state, and does not contaminate a chamber of a semiconductor production apparatus by the raking-out operation.;SOLUTION: During energization and operation suspension of a vacuum pump 10 of a root type vacuum pump or a screw type vacuum pump which is provided with two sets of rotating shafts 13 having pump rotors inverting synchronously within a pump casing 11, by causing each pump rotor to repeat an inting for a period of time arbitrarily set to equal to or smaller than one revolution in forward/reverse directions, foreign substances 100 generated between the pump casing 11 and the impeller 12, or between the impellers are raked out, and occurrence of biting state at the starting of the pump is avoided.;COPYRIGHT: (C)2010,JPO&INPIT