PERIODIC STRUCTURE GENERATING METHOD AND PERIODIC STRUCTURE GENERATING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a periodic structure generating method and a periodic structure generating device, capable of shortening generation work time without degrading flexibility in patterning of a periodic structure, which is excellent in productivity.SOLUTION: While a main scanning deflector 5 which performs main scanning and a sub scanning deflector 6 which performs sub scanning are simultaneously and continuously operated, the relationship between a repeating frequency of a pulse laser light source 1 and a main scanning frequency of the main scanning deflector 5 is kept to be a relation of integer ratio or the ratio obtained by adding a constant number to the relation of integer ratio or subtracting from the relation of integer ratio, thus an overlapping position is controlled so that a laser radiation spot contains a part of the spot that has been radiated with laser, for two-dimensional scanning.