Polarization state control device, lithographic apparatus, polarization state control method, and computer readable media

摘要

PROBLEM TO BE SOLVED: To provide a device and a method used for controlling a polarization state of an emitted beam.;SOLUTION: A polarization control unit is configured to adjust a polarization state of at least a part of an emitted beam. A measurement arrangement is configured to successively measure the polarization state of the part of the emitted beam. A feedback unit is configured to supply a signal to a polarization control arrangement based on the measured polarization state in order to correct the deviation of the polarization state of the part of the emitted beam from a desired polarization state. For instance, the correction makes the polarization state of the part of the emitted beam surely come into the desired polarization state or return to the desired polarization state.;COPYRIGHT: (C)2009,JPO&INPIT