DEVICE WITH A SURFACE CONTAMINATION PREVENTING UNIT FOR ANALYZING A PARTICLE AND A BY-PRODUCT GENERATED IN A VACUUM PROCESS, CAPABLE OF PREVENTING SURFACE CONTAMINATION ON AN INCIDENT WINDOW AND A PROJECTION WINDOW

摘要

PURPOSE: A device with a surface contamination preventing unit for analyzing a particle and a by-product generated in a vacuum process is provided to improve analysis reliability by including a surface contamination preventing unit capable of preventing surface contamination on an incident window and a projection window.;CONSTITUTION: A device for analyzing a particle and a by-product generated in a vacuum process comprises an exhaust pipe(20), an incident window(30), a projection window(40), an optical generator, a detector, and a surface contamination preventing unit. The exhaust pipe exhausts the particle and by-product generated inside the inside of a chamber of a vacuum state. The incident window includes an incident region where beams are incident into the inside of the incident window through a first hollow unit(21a) of the exhaust pipe and a first supporting region where the circumference of the incident region is supported by the exhaust pipe. The optical generator applies the beams to the incident window. The detector detects the beam incident into the inside of the incident window and projected. The surface contamination preventing unit includes a sound wave generator generating acoustic waves to the incident and projection windows and a sealing member(72) sealing by being pressed between a first supporting region of the incident window and the exhaust pipe and between a second supporting region of the projection window and the exhaust pipe.;COPYRIGHT KIPO 2013