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METHOD FOR REPRINTING A PATTERN USING A TRANSFER DEVICE AND A METHOD FOR IRRADIATING AN ION BEAM CAPABLE OF UNIFORMLY REPRINTING THE PATTERN ON A CYLINDRICAL MOLD
METHOD FOR REPRINTING A PATTERN USING A TRANSFER DEVICE AND A METHOD FOR IRRADIATING AN ION BEAM CAPABLE OF UNIFORMLY REPRINTING THE PATTERN ON A CYLINDRICAL MOLD
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机译:使用转移装置重印图案的方法和对能够均匀地重印圆柱体上的图案的离子束进行辐照的方法
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摘要
PURPOSE: A method for reprinting a pattern using a transfer device and a method for irradiating an ion beam are provided to minimize a joint by reprinting the pattern on a cylindrical mold while moving a two-dimensional pattern mask.;CONSTITUTION: A two-dimensional pattern mask(240) is located on a transfer device(200). A cylindrical mold(100) for reprinting a pattern of a two-dimensional pattern mask is located in the lower center of the transfer device. A shadow mask(260) with a gap(265) is located on the upper side of the two-dimensional pattern mask. The pattern is reprinted on a part of the outer side of the cylindrical mold by exposing a part of the two-dimensional pattern mask using an optical source(280). The two-dimensional pattern mask is moved by equally performing the linear movement of the transfer device and the rotational movement of the cylindrical mold.;COPYRIGHT KIPO 2013
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