首页> 外国专利> INTERFEROMETER USING ASYMMETRICAL POLARIZATION CAPABLE OF CONTROLLING THE CONTRAST RATIO OF INTERFERENCE PATTERN THAT IS GENERATED DUE TO INTERFERENCE LIGHT WHICH APPROACHES AN IMAGE PICK-UP DEVICE AND AN OPTICAL DEVICE USING THE SAME

INTERFEROMETER USING ASYMMETRICAL POLARIZATION CAPABLE OF CONTROLLING THE CONTRAST RATIO OF INTERFERENCE PATTERN THAT IS GENERATED DUE TO INTERFERENCE LIGHT WHICH APPROACHES AN IMAGE PICK-UP DEVICE AND AN OPTICAL DEVICE USING THE SAME

机译:使用不对称极化的干涉仪,该偏振仪能够控制由于干涉光而产生的干涉图案的对比度,该干涉光接近采用图像拾取装置和光学装置的干涉光

摘要

PURPOSE: An interferometer using asymmetrical polarization and an optical device using the same are provided to allow polarization to penetrate by the interference light, thereby controlling the contrast of interference pattern that an object light and a reference light form in the image pick-up device.;CONSTITUTION: An interferometer using asymmetrical polarization includes a first wavelength plate (370), a first polarization beam splitter (310), a second wavelength plate (340), a third wavelength plate (350), a object to be measured (320), a reference mirror (330), and a first polarization plate (360). The first wavelength plate is installed in the progressive direction of light that is generated in a light source. The first polarization beam splitter reflects part of light that is passed through the first wavelength plate in a first direction, and penetrates part of light in a second direction. The second wavelength plate is arranged in the progressive direction of light that is reflected to the first direction. The third wavelength plate is arranged in the progressive direction of light that is penetrated in the second direction. The object to be measured is arranged in the progressive direction of light that is passed though the second wavelength plate. The reference mirror is arranged in the progressive direction of light that is passed though the third wavelength plate.;COPYRIGHT KIPO 2013
机译:目的:提供使用非对称偏振的干涉仪和使用其的光学装置,以使偏振能够被干涉光穿透,从而控制在图像拾取装置中物体光和参考光形成的干涉图案的对比度。组成:使用非对称偏振的干涉仪,包括第一波片(370),第一偏振分束器(310),第二波片(340),第三波片(350),待测物体(320) ,参考镜(330)和第一偏振板(360)。第一波长板沿在光源中产生的光的渐进方向安装。第一偏振分束器在第一方向上反射通过第一波长板的一部分光,并且在第二方向上透射一部分光。第二波长板沿被反射到第一方向的光的渐进方向布置。第三波长板沿在第二方向上穿透的光的行进方向布置。被测物体沿通过第二波长板的光的行进方向排列。参考镜沿通过第三波长板的光的渐进方向排列。; COPYRIGHT KIPO 2013

著录项

  • 公开/公告号KR20130082279A

    专利类型

  • 公开/公告日2013-07-19

    原文格式PDF

  • 申请/专利权人 KOH YOUNG TECHNOLOGY INC.;

    申请/专利号KR20120003401

  • 发明设计人 SER JANG IL;

    申请日2012-01-11

  • 分类号G01B9/02;

  • 国家 KR

  • 入库时间 2022-08-21 16:26:39

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