首页> 外国专利> Semiconductor structure for MOSFET, has single well formed in contact with part of back gate of n-type double gate transistor and part of back gate of p-type double gate transistor, where gates are doped with same doping agent

Semiconductor structure for MOSFET, has single well formed in contact with part of back gate of n-type double gate transistor and part of back gate of p-type double gate transistor, where gates are doped with same doping agent

机译:用于MOSFET的半导体结构,具有与n型双栅晶体管的背栅的一部分和p型双栅晶体管的背栅的一部分相接触的单阱,其中栅极被相同的掺杂剂掺杂。

摘要

The structure (1) has a n-type double gate transistor (1110) and a p-type double gate transistor (1210), which are formed with respective metal back gates (1101, 1201). Single well (1102) is formed in contact with a part of the back gate and a part of another back gate. An insulation trench (1400) electrically isolates the former back gate from the latter back gate. The back gates are doped with a same doping agent and electrically connected with each other. The well is formed in an area entirely recovering the back gates. The structure comprises silicon-on insulator substrate. An independent claim is also included for a method for manufacturing a semiconductor structure.
机译:结构(1)具有分别由金属背栅(1101、1201)形成的n型双栅晶体管(1110)和p型双栅晶体管(1210)。形成单阱(1102),使其与部分背栅和另一部分背栅接触。绝缘沟槽(1400)将前背栅与后背栅电隔离。背栅用相同的掺杂剂掺杂并且彼此电连接。阱形成在完全恢复背栅的区域中。该结构包括绝缘体上硅衬底。还包括用于制造半导体结构的方法的独立权利要求。

著录项

  • 公开/公告号FR2983345A1

    专利类型

  • 公开/公告日2013-05-31

    原文格式PDF

  • 申请/专利权人 SOITEC;

    申请/专利号FR20110060977

  • 申请日2011-11-30

  • 分类号H01L21/8238;H01L27/085;H01L27/092;

  • 国家 FR

  • 入库时间 2022-08-21 16:21:00

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