Being the standard component for proofreading in order to proofread the proofreading methodological null scanning electron microscope of the standard component

摘要

The standard reference material which does magnification ratio proofreading which is used with the electron microscope at high order accuracy is offered. This invention, scanning the incident electronic beam in the observation field on the test portion, from the secondary electron or the information of reflected electronic strength which is generated, being the canonical component for proofreading which proofreads the scanning electron microscope which measures the pattern inside the aforementioned observation field, the 1st pattern field which consists of the irregularity pattern (line/space pattern) of the profile where the multilayer film which proofreads magnification ratio is laminated and, has the 2nd pattern field for the beam adjustment which the same periodicity pattern as the pattern pitch size of the 1st field is not indwelling in general in the same height to the 1st pattern vicinity.