Being the manner which generates operational reshipi

摘要

PROBLEM TO BE SOLVED: To provide a method for forming an operational recipe of a polishing device that reduces time and effort required for numerical input of parameters that determine operation of a polishing head.;SOLUTION: A polishing device includes: a plurality of polishing heads 30A-30D for polishing the peripheral edge of a substrate W by using polishing tape 23; and an operation control part 69 for controlling operation of the plurality of polishing heads 30A-30D. An operational recipe of the polishing device is produced by storing a plurality of parameters, determining operation of the polishing heads, in the operation control part 69, by generating at least one polishing-head recipe, composed of the plurality of parameters, in the operation control part 69, and by associating the plurality of polishing heads 30A-30D with the polishing-head recipe.;COPYRIGHT: (C)2011,JPO&INPIT