Formation Of Laser Induced Periodic Surface Structures (LIPSS) With Picosecond Pulses

摘要

A method of forming a laser induced periodic surface structure (LIPSS), comprises directing a beam of picosecond laser pulses across the surface of a polycrystalline material to pattern the material with a LIPSS, where the laser pulses have a time duration of no greater than a selected pulse duration T and a pulse fluence above a threshold value of about H; wherein the laser pulses are directed across the surface so as to expose the polycrystalline material to at least a selected dosage; wherein T is 40 ps and the selected dosage is 20 J/mm²; and wherein H is in J/cm² and is given by H=[0.0284×ln (T)]+0.0195. Also disclosed are methods for forming a LIPSS on a semiconductor, for solid colorization of materials, and for forming cone-like features and/or regions of grating-like features where the grating-like features are oriented in substantially different directions.