Method of manufacturing silicon nanowires using porous glass template and device comprising silicon nanowires formed by the same

摘要

Disclosed herein is a method of manufacturing silicon nanowires, which is characterized in that silicon nanowires are formed and grown through a solid-liquid-solid process or a vapor-liquid-solid process using a porous glass template having nanopores doped with erbium or an erbium precursor. In addition, a device including silicon nanowires formed using the method is provided. The silicon nanowires manufactured according to this invention can be effectively applied to various devices, for example, electronic devices such as field effect transistors, sensors, photodetectors, light emitting diodes, laser diodes, etc.